Keyword : doping profile extraction


Inverse Modeling and Its Application to MOSFET Channel Profile Extraction
Hirokazu HAYASHI Hideaki MATSUHASHI Koichi FUKUDA Kenji NISHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 862-869
Type of Manuscript:  INVITED PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
inverse modelingdoping profile extractionMOSFETthreshold voltage
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