Keyword : diaphragm


Fabrication and Testing of an Ink-Jet Head Based on Buckling Behavior
Susumu HIRATA Shingo ABE Yorishige ISHII Hirotsugu MATOBA Tetsuya INUI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 214-220
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Actuator
Keyword: 
ink-jet headbucklingdiaphragmelectro-plating
 Summary | Full Text:PDF

Capacitive Pressure Sensor with Center Clamped Diaphragm
Toshihiko OMI Kenji HORIBATA Fumihiko SATO Masashi TAKEUCHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/02/25
Vol. E80-C  No. 2 ; pp. 263-268
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachine Technology)
Category: Sensor
Keyword: 
capacitancepressure sensorlinearitydiaphragmmicromachining
 Summary | Full Text:PDF