Keyword : defect


Efficient Scattering Analysis of Arbitrarily Shaped Local Defect in Diffraction Grating
Jun-ichiro SUGISAKA Takashi YASUI Koichi HIRAYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/01/01
Vol. E99-C  No. 1 ; pp. 76-80
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
diffraction gratingboundary-element methoddefectscatteringnumerical analysis
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Scattering of TM Plane Wave from Periodic Grating with Single Defect
Kazuhiro HATTORI Junichi NAKAYAMA Yasuhiko TAMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/01/01
Vol. E91-C  No. 1 ; pp. 17-25
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Electromagnetic Theory and Its Application)
Category: Scattering and Diffraction
Keyword: 
scatteringperiodic gratingdefectTM plane waverectangular groovesincoherent Wood's anomalyguided surface wave
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Scattering of TE Plane Wave from Periodic Grating with Single Defect
Kazuhiro HATTORI Junichi NAKAYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/02/01
Vol. E90-C  No. 2 ; pp. 312-319
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Electromagnetic Theory and Its Application)
Category: Periodic Structures
Keyword: 
scatteringperiodic gratingdefectTE plane waverectangular groovessingle scattering approximation
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Annealing Induced Diffusion Dynamics in As Ion-Implanted GaAs
Hiroyuki SHINOJIMA Ryuzi YANO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 46-50
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Fabrication
Keyword: 
As ion implantationGaAsdefectannealingVGa vacancy assisted diffusionpseudoactivation energy
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METROPOLE-3D: An Efficient and Rigorous 3D Photolithography Simulator
Andrzej J. STROJWAS Xiaolei LI Kevin D. LUCAS 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/06/25
Vol. E82-C  No. 6 ; pp. 821-829
Type of Manuscript:  INVITED PAPER (Special Issue on TCAD for Semiconductor Industries)
Category: 
Keyword: 
modelingtopography simulationmanufacturabilityreflective notchinganti-reflective layerdefect
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Observation Techinique for Process-Induced Defects Using Anodic Oxidation
Morio INOUE Shinji FUJII 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 324-327
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
delineationdefectanodic oxidationfabricationfailure analysis
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Particle Growth Caused by Film Deposition in VLSI Manufacturing Process
Yoshimasa TAKII Yuichi MIYOSHI Yuichi HIROFUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 312-316
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: Particle/Defect Control and Analysis
Keyword: 
particle growthparticledefectclean technologyfilm deposition
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Use of a Monte Carlo Wiring Yield Simulator to Optimize Design of Random Logic Circuits for Yield Enhancement
Hideyuki FUKUHARA Takao KOMATSUZAKI Katsushi BOKU Yoichi MIYAI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/07/25
Vol. E78-C  No. 7 ; pp. 852-857
Type of Manuscript:  Special Section PAPER (Special Issue on LSI Memory Device, Circuit, Architecture and Application Technologies for Multimedia Age)
Category: 
Keyword: 
yieldrandom logic circuitrydefectMonte Calro simulation
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Defect Detection of Passivation Layer by a Bias-Free Cu Decoration Method
Tetsuaki WADA Shinji NAKANO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/04/25
Vol. E77-C  No. 4 ; pp. 585-589
Type of Manuscript:  Special Section PAPER (Special Issue on LSI Failure Analysis)
Category: 
Keyword: 
semiconductorpassivationdefectreliabilityhumidity test
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Identification of the Particle Source in LSI Manufacturing Process Equipment
Yoshimasa TAKII Nobuo AOI Yuichi HIROFUJI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 486-491
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
clean technologyparticledefectequipmentparticle source
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Array Structure Using Basic Wiring Channels for WSI Hypercube
Hideo ITO  
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 1992/11/25
Vol. E75-D  No. 6 ; pp. 884-893
Type of Manuscript:  PAPER
Category: Fault Tolerant Computing
Keyword: 
wafer-scale integrationhypercubearraybasic channeldefect
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