Keyword : dc sputtering


Fabrication of YBa2Cu3O7x-PrBa2Cu3O7y Hetero-Structure by Using a Hollow Cathode Discharge Sputtering System
Akio KAWABATA Tadayuki KOBAYASHI Kouichi USAMI Toshinari GOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/08/25
Vol. E76-C  No. 8 ; pp. 1236-1240
Type of Manuscript:  Special Section PAPER (Special Issue on High-Temperature Superconducting Electronics)
Category: 
Keyword: 
YBCOcritical temperaturehetero-structurehollow cathode effectdc sputtering
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