Keyword : corrugated bridge


Low Actuation Voltage Capacitive Shunt RF-MEMS Switch Having a Corrugated Bridge
Yo-Tak SONG Hai-Young LEE Masayoshi ESASHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/12/01
Vol. E89-C  No. 12 ; pp. 1880-1887
Type of Manuscript:  Special Section PAPER (Special Section on Emerging Microwave Techniques)
Category: Passive Circuits/Components
Keyword: 
low-actuation voltageRF-MEMScapacitive shunt switchmicrowave and millimeter-wavecorrugated bridgeresidual stress
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