Keyword : correlation length


On the Estimation of Rough Surface Parameters from Surface Profile Data --- Correlation Length Estimate Using a Surface Slope Function ---
Masahiko NISHIMOTO Kohichi OGATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/01/01
Vol. E93-C  No. 1 ; pp. 89-93
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
Gaussian rough surfaceroot-mean-square heightcorrelation length
 Summary | Full Text:PDF

Design Guidelines and Process Quality Improvement for Treatment of Device Variations in an LSI Chip
Masakazu AOKI Shin-ichi OHKAWA Hiroo MASUDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Vol. E88-C  No. 5 ; pp. 788-795
Type of Manuscript:  Special Section PAPER (Special Section on Microelectronic Test Structures)
Category: 
Keyword: 
within-die parameter variationrandom variationsystematic variationcorrelation lengthfitting function
 Summary | Full Text:PDF