Keyword : contamination


Influence of Silicone Vapor on Micro-Motor Reliability
Terutaka TAMAI Kiyoshi OGAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/06/01
Vol. E86-C  No. 6 ; pp. 885-890
Type of Manuscript:  Special Section PAPER (Special Issue on Recent Development of Electro-Mechanical Devices (IS-EMD 2002))
Category: Contact Phenomena
Keyword: 
silicone vapormicro-motorcontaminationreliabilitySiO2
 Summary | Full Text:PDF

Plasma-Parameter-Extraction for Minimizing Contamination and Damage in RIE Processes
Takeo YAMASHITA Satoshi HASAKA Iwao NATORI Tadahiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/07/25
Vol. E75-C  No. 7 ; pp. 839-843
Type of Manuscript:  Special Section PAPER (Special Issue on Ultra Clean Technology)
Category: 
Keyword: 
ion energyion fluxcontaminationion energy-flux parameter map
 Summary | Full Text:PDF