Keyword : combinatorial deposition


High-Luminance EL Devices Using Zn2Si1-XGeXO4:Mn Thin Films Prepared by Combinatorial Deposition by r.f. Magnetron Sputtering with Subdivided Powder Targets
Toshihiro MIYATA Yu MOCHIZUKI Tadatsugu MINAMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/11/01
Vol. E88-C  No. 11 ; pp. 2065-2069
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
combinatorial depositionsubdivided powder targetsmagnetron sputteringphosphorthin-filmelectroluminescence
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