Keyword : charge stability


Fabrication of Silicon Dioxide Electrets by Plasma CVD Process for Microsystems, and Evaluation of Their Long-Term Charge Stability
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1997/01/25
Vol. E80-C  No. 1 ; pp. 174-183
Type of Manuscript:  PAPER
Category: Components
Keyword: 
microsystemssensorsactuatorselectrostatic fieldelectretsilicon dioxidecharge stabilitythermally stimulated current
 Summary | Full Text:PDF

The Long-Term Charge Storage Mechanism of Silicon Dioxide Electrets for Microsystems
Mitsuo ICHIYA Takuro NAKAMURA Shuji NAKATA Jacques LEWINER 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/10/25
Vol. E79-C  No. 10 ; pp. 1462-1466
Type of Manuscript:  PAPER
Category: Materials
Keyword: 
electretsilicon dioxideplasma chemical vapor depositioncharge stabilitythermally stimulated currentelectron spin resonance
 Summary | Full Text:PDF