Keyword : channel width


A Test Structure to Analyze Electrical CMOSFET Reliabilities between Center and Edge along the Channel Width
Takashi OHZONE Eiji ISHII Takayuki MORISHITA Kiyotaka KOMOKU Toshihiro MATSUDA Hideyuki IWATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/02/01
Vol. E90-C  No. 2 ; pp. 515-522
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CMOSFETreliabilityLDD-typechannel widthisolation
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