Keyword : cell projection


High Speed Electron Beam Cell Projection Exposure System
Yoshihiko OKAMOTO Norio SAITOU Haruo YODA Yoshio SAKITANI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/03/25
Vol. E77-C  No. 3 ; pp. 445-452
Type of Manuscript:  Special Section PAPER (Special Issue on Quarter Micron Si Device and Process Technologies)
Category: Process Technology
Keyword: 
cell projectionelectron beamlithographymask processexposure data
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