Keyword : backscattering electron


Robust Surface Reconstruction in SEM Using Two BSE Detectors
Deshan CHEN Atsushi MIYAMOTO Shun'ichi KANEKO 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 2013/10/01
Vol. E96-D  No. 10 ; pp. 2224-2234
Type of Manuscript:  PAPER
Category: Image Recognition, Computer Vision
Keyword: 
scanning electron microscope (SEM)surface reconstructionshadowing compensationbackscattering electron
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