Keyword : atomistic


The Process Modeling Hierarchy: Connecting Atomistic Calculations to Nanoscale Behavior
Scott T. DUNHAM Pavel FASTENKO Zudian QIN Milan DIEBEL 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 276-283
Type of Manuscript:  INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
atomisticdiffusionactivationdoping fluctuationssilicon
 Summary | Full Text:PDF(585.4KB)

Three Dimensional MOSFET Simulation for Analyzing Statistical Dopant-Induced Fluctuations Associated with Atomistic Process Simulator
Tatsuya EZAKI Takeo IKEZAWA Akio NOTSU Katsuhiko TANAKA Masami HANE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/03/01
Vol. E86-C  No. 3 ; pp. 409-415
Type of Manuscript:  INVITED PAPER (Special Issue on the 2002 IEEE International Conference on Simulation of Semiconductor Processes and Devices (SISPAD'02))
Category: 
Keyword: 
atomisticfluctuationprocess simulationdevice simulation
 Summary | Full Text:PDF(982.6KB)