Keyword : aspect ratio

Selective Epitaxial Growth of SiGe Layers with High Aspect Ratio Mask of Dielectric Films
A-Ram CHOI Sang-Sik CHOI Byung-Guan PARK Dongwoo SUH Gyungock KIM Jin-Tae KIM Jin-Soo CHOI Deok-Ho CHO Tae-Hyun HAN Kyu-Hwan SHIM 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/05/01
Vol. E91-C  No. 5 ; pp. 767-771
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
SiGeSEGaspect ratioRPCVD
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A Study of Aspect Ratio of the Aperture and the Effect on Antenna Efficiency in Oversized Rectangular Slotted Waveguide Arrays
Hisahiro KAI Jiro HIROKAWA Makoto ANDO 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2004/06/01
Vol. E87-B  No. 6 ; pp. 1623-1630
Type of Manuscript:  PAPER
Category: Antenna and Propagation
parallel plate slotted waveguide arraysoversized rectangular slotted waveguide arraysaperture efficiencyaperture illuminationaspect ratio
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VLSI Layout of Trees into Grids of Minimum Width
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2004/05/01
Vol. E87-A  No. 5 ; pp. 1059-1069
Type of Manuscript:  Special Section PAPER (Special Section on Discrete Mathematics and Its Applications)
VLSI layoutgraph layoutgraph embeddinggridaspect ratio
 Summary | Full Text:PDF(391.4KB)

Tantalum Dry-Etching Characteristics for X-Ray Mask Fabrication
Akira OZAWA Shigehisa OHKI Masatoshi ODA Hideo YOSHIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/02/25
Vol. E77-C  No. 2 ; pp. 255-262
Type of Manuscript:  PAPER
Category: Integrated Electronics
X-ray masktantalum absorber patternreactive ion etching (RIE)electron-cyclotron-resonance (ECR) ion-stream etchingaspect ratiomicro-loading effectprotection effect
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