Keyword : antenna effect


Plasma-Induced Transconductance Degradation of nMOSFET with Thin Gate Oxide
Koji ERIGUCHI Masatoshi ARAI Yukiharu URAOKA Masafumi KUBOTA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/03/25
Vol. E78-C  No. 3 ; pp. 261-266
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-1/4 Micron Device and Process Technologies)
Category: 
Keyword: 
MOSFETtransconductanceSi-SiO2 interface statecharge-to-breakdownantenna effect
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