| Keyword : annealing
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High-Quality Low-Dose SIMOX Wafers Sadao NAKASHIMA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C
No. 3 ;
pp. 364-369
Type of Manuscript:
INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Wafer Technologies Keyword: SOI, SIMOX, annealing, oxidation, Si, | | Summary | Full Text:PDF(487.1KB) | |
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