Keyword : anisotropic etching


Fabrication of Silicon Quantum Wires and Dots
Yoshihiko HIRAI Kiyoshi MORIMOTO Masaaki NIWA Koichiro YUKI Juro YASUI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/09/25
Vol. E77-C  No. 9 ; pp. 1426-1430
Type of Manuscript:  Special Section PAPER (Special Issue on Heterostructure Devices and Epitaxial Growth Techniques)
Category: 
Keyword: 
siliconquantum wirequantum dotanisotropic etching
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