Keyword : aluminum


Optical Filters Based on Nano-Sized Hole and Slit Patterns in Aluminum Films
Daisuke INOUE Atsushi MIURA Tsuyoshi NOMURA Hisayoshi FUJIKAWA Kazuo SATO Naoki IKEDA Daiju TSUYA Yoshimasa SUGIMOTO Yasuo KOIDE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/03/01
Vol. E99-C  No. 3 ; pp. 358-364
Type of Manuscript:  Special Section PAPER (Special Section on Progress towards System Nanotechnology)
Category: 
Keyword: 
surface plasmonnano holenano slitaluminumextraordinary transmission
 Summary | Full Text:PDF

Color Filter Based on Surface Plasmon Resonance Utilizing Sub-Micron Periodic Hole Array in Aluminum Thin Film
Naoki IKEDA Yoshimasa SUGIMOTO Masayuki OCHIAI Daijyu TSUYA Yasuo KOIDE Daisuke INOUE Atsushi MIURA Tsuyoshi NOMURA Hisayoshi FUJIKAWA Kazuo SATO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/02/01
Vol. E95-C  No. 2 ; pp. 251-254
Type of Manuscript:  BRIEF PAPER
Category: 
Keyword: 
surface plasmon resonancealuminumcolor filterelectron beam lithographyreactive ion etching
 Summary | Full Text:PDF

Via Electromigration Characteristics in Aluminum Based Multilevel Interconnection
Takahisa YAMAHA Masaru NAITO Tadahiko HOTTA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 1994/01/25
Vol. E77-A  No. 1 ; pp. 187-194
Type of Manuscript:  Special Section PAPER (Special Section on Reliability)
Category: Failure Physics and Failure Analysis
Keyword: 
reliabilityelectromigrationmetallizationvia contactmultilevel interconnectionlaminated interconnectionsaluminum
 Summary | Full Text:PDF

Synchrotron Radiation Induced Direct Projection Patterning of Aluminum on Si and SiO2 Surfaces
Fumihiko UESUGI Iwao NISHIYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C  No. 1 ; pp. 47-54
Type of Manuscript:  Special Section PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword: 
synchrotron radiationsurface modificationaluminumchemical vapor depositionreaction controlgrowth suppressiongrowth initiationchemical shift
 Summary | Full Text:PDF