Keyword : alkoxide precursor


Crystallization Process of Sr0. 7Bi2. 3Ta2O9 Thin Films with Different Crystal Orientation Prepared by Chemical Liquid Deposition Using Alkoxide Precursor
Ichiro KOIWA Takao KANEHARA Juro MITA Tetsuya OSAKA Sachiko ONO Akira SAKAKIBARA Tomonori SEKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 552-559
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
ferroelectric memorySrBi2Ta2O9 thin filmcrystallization processalkoxide precursor
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