Keyword : WNx


Thermal Stability of W2N Compound Barrier in W/W2N/poly-Si Gate Electrode Configuration
Atsushi NOYA Mayumi B. TAKEYAMA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2003/11/01
Vol. E86-C  No. 11 ; pp. 2332-2335
Type of Manuscript:  LETTER
Category: Electronic Materials
Keyword: 
metallizationMOSgate electrodeWNx
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