Keyword : VIA

A Structured Routing Architecture for Practical Application of Character Projection Method in Electron-Beam Direct Writing
Rimon IKENO Takashi MARUYAMA Satoshi KOMATSU Tetsuya IIZUKA Makoto IKEDA Kunihiro ASADA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2014/08/01
Vol. E97-A  No. 8 ; pp. 1688-1698
Type of Manuscript:  PAPER
Category: VLSI Design Technology and CAD
Keyword: 
Electron Beam Direct Writing, Character Projection, routing, interconnect, VIA, 
 Summary | Full Text:PDF
High-Throughput Electron Beam Direct Writing of VIA Layers by Character Projection with One-Dimensional VIA Characters
Rimon IKENO Takashi MARUYAMA Satoshi KOMATSU Tetsuya IIZUKA Makoto IKEDA Kunihiro ASADA 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2013/12/01
Vol. E96-A  No. 12 ; pp. 2458-2466
Type of Manuscript:  Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Physical Level Design
Keyword: 
electron beam direct writing, character projection, VIA, interconnect, routing, 
 Summary | Full Text:PDF