Publication: IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences Publication Date: 2014/08/01 Vol. E97-ANo. 8 ;
pp. 1688-1698 Type of Manuscript: PAPER Category: VLSI Design Technology and CAD Keyword: Electron Beam Direct Writing, Character Projection, routing, interconnect, VIA,
Publication: IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences Publication Date: 2013/12/01 Vol. E96-ANo. 12 ;
pp. 2458-2466 Type of Manuscript: Special Section PAPER (Special Section on VLSI Design and CAD Algorithms) Category: Physical Level Design Keyword: electron beam direct writing, character projection, VIA, interconnect, routing,