Keyword : UV-imprint lithography


Recent Situation of the UV Imprint Lithography and Its Application to the Photonics Devices
Masashi NAKAO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2016/03/01
Vol. E99-C  No. 3 ; pp. 333-338
Type of Manuscript:  INVITED PAPER (Special Section on Progress towards System Nanotechnology)
Category: 
Keyword: 
UV-imprint lithographyPDMSLN filterdry etchingsapphire substratealumina nanohole
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