Keyword : ULSI

Sequential Dry Cleaning System for Highly-Controlled Silicon Surfaces
Takashi ITO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 375-381
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
ULSI, clean surface, native oxide, photo-excitation, hydrogen termination, 
 Summary | Full Text:PDF(509.5KB)
ULSI Memory for Multimedia Applications
Yasuo AKATSUKA Yoichi YANO Shigeo NIITSU Akihiko MORINO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/07/25
Vol. E78-C  No. 7 ; pp. 766-772
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Memory Device, Circuit, Architecture and Application Technologies for Multimedia Age)
Category: 
Keyword: 
ULSI, memory, multimedia, application, 
 Summary | Full Text:PDF(1MB)
ULSI Technology Trends toward 256K/1G DRAMs
Masahiro KASHIWAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/11/25
Vol. E75-C  No. 11 ; pp. 1304-1312
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Memories)
Category: 
Keyword: 
ULSI, DRAM, technology trend, SOI, vertical processing, 
 Summary | Full Text:PDF(1MB)