Keyword : ULSI


Sequential Dry Cleaning System for Highly-Controlled Silicon Surfaces
Takashi ITO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1996/03/25
Vol. E79-C  No. 3 ; pp. 375-381
Type of Manuscript:  Special Section PAPER (Special Issue on Scientific ULSI Manufacturing Technology)
Category: High-Performance Processing
Keyword: 
ULSIclean surfacenative oxidephoto-excitationhydrogen termination
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ULSI Memory for Multimedia Applications
Yasuo AKATSUKA Yoichi YANO Shigeo NIITSU Akihiko MORINO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/07/25
Vol. E78-C  No. 7 ; pp. 766-772
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Memory Device, Circuit, Architecture and Application Technologies for Multimedia Age)
Category: 
Keyword: 
ULSImemorymultimediaapplication
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ULSI Technology Trends toward 256K/1G DRAMs
Masahiro KASHIWAGI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1992/11/25
Vol. E75-C  No. 11 ; pp. 1304-1312
Type of Manuscript:  INVITED PAPER (Special Issue on LSI Memories)
Category: 
Keyword: 
ULSIDRAMtechnology trendSOIvertical processing
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