Keyword : TEM observation


Structural Defects in Sr0. 7Bi2. 3Ta2O9 Thin Film for Ferroelectric Memory
Tetsuya OSAKA Sachiko ONO Akira SAKAKIBARA Ichiro KOIWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/04/25
Vol. E81-C  No. 4 ; pp. 545-551
Type of Manuscript:  Special Section PAPER (Special Issue on Advanced Memory Devices Using High-Dielectric-Constant and Ferroelectric Thin Films)
Category: 
Keyword: 
ferroelectric memorystructural defectsSr0.7Bi2.3Ta2O9 thin filmTEM observationchemical liquid deposition
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