Keyword : SiON

High UV Sensitivity of SiON Film and Its Application to Center Wavelength Trimming of Microring Resonator Filter
Satoshi UENO Toshiki NAGANAWA Yasuo KOKUBUN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2005/05/01
Vol. E88-C  No. 5 ; pp. 998-1004
Type of Manuscript:  Special Section PAPER (Joint Special Section on Recent Progress in Optoelectronics and Communications)
Category: Optical Passive Devices and Modules
microring resonatorUV sensitivitytrimmingSiON
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