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Field-Emission from Finely Nicked Structures on n-Type Silicon Substrate Formed by Sandblasting Process Tomomi YOSHIMOTO Tatsuo IWATA | Publication:
Publication Date: 2019/02/01
Vol. E102-C
No. 2 ;
pp. 207-210
Type of Manuscript:
BRIEF PAPER
Category: Electron Tubes, Vacuum and Beam Technology Keyword: field emission, Si, sandblasting process, | | Summary | Full Text:PDF | |
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High-Quality Low-Dose SIMOX Wafers Sadao NAKASHIMA | Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1997/03/25
Vol. E80-C
No. 3 ;
pp. 364-369
Type of Manuscript:
INVITED PAPER (Special Issue on SOI Devices and Their Process Technologies)
Category: Wafer Technologies Keyword: SOI, SIMOX, annealing, oxidation, Si, | | Summary | Full Text:PDF | |
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