Keyword : SFM


Scanning Force Microscope Using Piezoelectric Excitation and Detection
Toshihiro ITOH Takahiro OHASHI Tadatomo SUGA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/02/25
Vol. E78-C  No. 2 ; pp. 146-151
Type of Manuscript:  Special Section PAPER (Special Issue on Micromachines and Micro Electro Mechanical Systems)
Category: 
Keyword: 
SFMpiezoelectric microcantileverZnOpiezoelectric excitationdeflection detection
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