Keyword : RIE-damage

The Recovery Process of RIE-Damage in InGaAs/AlGaAs PHEMT Using Recombination Enhanced Defect Reaction
Shinichi HOSHI Takayuki IZUMI Tomoyuki OHSHIMA Masanori TSUNOTANI Tamotsu KIMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2001/10/01
Vol. E84-C  No. 10 ; pp. 1350-1355
Type of Manuscript:  Special Section PAPER (Joint Special Issue on Heterostructure Microelectronics with TWHM 2000 (Topical Workshop on Heterostructure Microelectronics 2000))
Category: Hetero-FETs & Their Integrated Circuits
InGaAs/AlGaAs pseudomorphic high electron mobility transistorRIE-damagerecombination enhanced defect reaction
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