Keyword : RF sputtering


The Influence of High-Temperature Sputtering on the N-Doped LaB6 Thin Film Formation Utilizing RF Sputtering
Kyung Eun PARK Shun-ichiro OHMI 
Publication:   
Publication Date: 2020/06/01
Vol. E103-C  No. 6 ; pp. 293-298
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Electronic Materials
Keyword: 
N-doped LaB6MOS diodeSchottky diodeeffective work functionRF sputtering
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Characterization of Resistance-Switching of Si Oxide Dielectrics Prepared by RF Sputtering
Akio OHTA Yuta GOTO Shingo NISHIGAKI Guobin WEI Hideki MURAKAMI Seiichiro HIGASHI Seiichi MIYAZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/05/01
Vol. E95-C  No. 5 ; pp. 879-884
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
resistive random access memory (ReRAM)Si oxideRF sputteringPt electrodesresistance switching
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Ka-Band Triangular Patch Antenna on Micromachined High-k Substrate
Preeti SHARMA Shiban K. KOUL Sudhir CHANDRA 
Publication:   IEICE TRANSACTIONS on Communications
Publication Date: 2008/06/01
Vol. E91-B  No. 6 ; pp. 2073-2076
Type of Manuscript:  LETTER
Category: Antennas and Propagation
Keyword: 
triangular patch antennabulk-micromachiningRF sputteringthin dielectric membranemillimeter-wave antennas
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