Keyword : PtSi

Modulation of PtSi Work Function by Alloying with Low Work Function Metal
Jun GAO Jumpei ISHIKAWA Shun-ichiro OHMI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2011/05/01
Vol. E94-C  No. 5 ; pp. 775-779
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
PtSimonosilicidealloywork functionSWC-anneal
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Analysis and Fabrication of P-Type Vertical PtSi Schottky Source/Drain MOSFET
Masafumi TSUTSUI Toshiaki NAGAI Masahiro ASADA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1191-1199
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
vertical transistorSchottky barrierSchottky source/drain transistorPtSisilicide
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