Keyword : PMA process


AuGe-Alloy Source and Drain Formation by the Lift-Off Process for the Scaling of Bottom-Contact Type Pentacene-Based OFETs
Shun-ichiro OHMI Mizuha HIROKI Yasutaka MAEDA 
Publication:   
Publication Date: 2019/02/01
Vol. E102-C  No. 2 ; pp. 138-142
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Organic Molecular Electronics and Biotechnology)
Category: 
Keyword: 
AuGebottom-contactpentaceneOFETlift-offyieldSPM cleaningPMA process
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