Keyword : Ohmic contact


A Study on Ohmic Contact to Dry-Etched p-GaN
Cheng-Yu HU Jin-Ping AO Masaya OKADA Yasuo OHNO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/07/01
Vol. E91-C  No. 7 ; pp. 1020-1024
Type of Manuscript:  Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007)
Category: GaN Process Technology
Keyword: 
Ohmic contactp-GaNdry-etchingetching damageSiCl4
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