Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2014/03/01
Vol. E97-C
No. 3 ;
pp. 132-140
Type of Manuscript:
INVITED PAPER (Special Section on Leading-Edge Technology of Superconductor Large-Scale Integrated Circuits)
Category:
Keyword:
superconducting fabrication technology, Nb/AlOx/Nb Josephson junction, single flux quantum, planarization, shift register, |
