Keyword : NEMS


Microoptomechatronics: An Overview
Kiyoshi ITAO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 3-5
Type of Manuscript:  INVITED REVIEW PAPER
Category: 
Keyword: 
microoptomechatronicsmicromachinenanomechatronicsnanomachineMEMSNEMS
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