Keyword : Monolithic integration


A Complete Methodology for Electro-Mechanical Characterization of a CMOS Compatible MEMS Technology
Laurent LATORRE Pascal NOUET 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/04/25
Vol. E82-C  No. 4 ; pp. 582-588
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
Micro-Electro-Mechanical SystemsMonolithic integrationcharacterizationanalytical modeling
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