Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 2004/01/01
Vol. E87-C
No. 1 ;
pp. 30-36
Type of Manuscript:
Special Section PAPER (Special Section on High-κ Gate Dielectrics)
Category:
Keyword:
high-κ gate dielectric, aluminum oxide, plasma nitridation, fixed charge, MOSFET performance, |