Keyword : MOS capacitor


Visible Electroluminescence from MOS Capacitors with Si-Implanted SiO2
Toshihiro MATSUDA Masaharu KAWABE Hideyuki IWATA Takashi OHZONE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/11/01
Vol. E85-C  No. 11 ; pp. 1895-1904
Type of Manuscript:  Special Section PAPER (Special Issue on Electronic Displays)
Category: EL Displays
Keyword: 
MOS capacitorelectroluminescenceSi-implantationSiO2
 Summary | Full Text:PDF

A Site Specification Method of Gate Oxide Breakdown Spots by a New Test Structure of MOS Capacitors
Satoshi IKEDA Hidetsugu UCHIDA Norio HIRASHITA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2002/05/01
Vol. E85-C  No. 5 ; pp. 1134-1137
Type of Manuscript:  Special Section PAPER (Special Issue on Microelectronic Test Structures)
Category: 
Keyword: 
MOS capacitorgate oxideOBICbreakdown spotXTEM
 Summary | Full Text:PDF