Keyword : MEMS switches


The Wear of Hot Switching Au/Cr-Au/MWCNT Contact Pairs for MEMS Contacts
John W. McBRIDE Hong LIU Chamaporn CHIANRABUTRA Adam P. LEWIS 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2015/09/01
Vol. E98-C  No. 9 ; pp. 912-918
Type of Manuscript:  Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices (IS-EMD2014))
Category: 
Keyword: 
MEMS switchescarbon nanotubes compositeswearfine transfer mechanismcontact resistance
 Summary | Full Text:PDF(4.2MB)

Micromachined RF Devices for Concurrent Integration on Dielectric-Air-Metal Structures
Tamotsu NISHINO Masatake HANGAI Yukihisa YOSHIDA Sang-Seok LEE 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/07/01
Vol. E93-C  No. 7 ; pp. 1111-1118
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Microwave and Millimeter-Wave Technologies)
Category: 
Keyword: 
micromachineMEMShollow waveguidesGCPWfiltershybridsMEMS switchessilicon
 Summary | Full Text:PDF(1.9MB)