Publication: IEICE TRANSACTIONS on Electronics Publication Date: 2015/09/01 Vol. E98-CNo. 9 ;
pp. 912-918 Type of Manuscript: Special Section PAPER (Special Section on Recent Development of Electro-Mechanical Devices (IS-EMD2014)) Category: Keyword: MEMS switches, carbon nanotubes composites, wear, fine transfer mechanism, contact resistance,
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pp. 1111-1118 Type of Manuscript: Special Section PAPER (Special Section on Recent Progress in Microwave and Millimeter-Wave Technologies) Category: Keyword: micromachine, MEMS, hollow waveguides, GCPW, filters, hybrids, MEMS switches, silicon,