Keyword : MEMS LSI integration


Integration of Chemical Sensors with LSI Technology – History and Applications –
Agnes TIXIER-MITA Takuya TAKAHASHI Hiroshi TOSHIYOSHI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2012/05/01
Vol. E95-C  No. 5 ; pp. 777-784
Type of Manuscript:  INVITED PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: 
Keyword: 
chemical sensorsMEMS technologyMEMS LSI integrationmonolithic integrationwireless sensors
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