Keyword : LSI memory


Process and Device Technologies for Subhalf-Micron LSI Memory
Katsuhiro TSUKAMOTO Hiroaki MORIMOTO 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1994/08/25
Vol. E77-C  No. 8 ; pp. 1343-1350
Type of Manuscript:  INVITED PAPER (Special Section on High Speed and High Density Multi Functional LSI Memories)
Category: General Technology
Keyword: 
LSI memorylithographyetchingMOS transistordielectric material
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