Keyword : LDD-type

A Test Structure to Analyze Electrical CMOSFET Reliabilities between Center and Edge along the Channel Width
Takashi OHZONE Eiji ISHII Takayuki MORISHITA Kiyotaka KOMOKU Toshihiro MATSUDA Hideyuki IWATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/02/01
Vol. E90-C  No. 2 ; pp. 515-522
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CMOSFET, reliability, LDD-type, channel width, isolation, 
 Summary | Full Text:PDF(1.3MB)
A Test Structure to Analyze Highly-Doped-Drain and Lightly-Doped-Drain in CMOSFET
Takashi OHZONE Kazuhiko OKADA Takayuki MORISHITA Kiyotaka KOMOKU Toshihiro MATSUDA Hideyuki IWATA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/09/01
Vol. E89-C  No. 9 ; pp. 1351-1357
Type of Manuscript:  PAPER
Category: Semiconductor Materials and Devices
Keyword: 
CMOSFET, LDD-type, source/drain-resistance, sheet resistance, 
 Summary | Full Text:PDF(997KB)