Keyword : KrF excimer laser


Application of KrF Excimer Laser Lithography to 256 MbDRAM Fabrication
Sin-ichi FUKUZAWA Hiroshi YOSHINO Shinji ISHIDA Kenji KONDOH Tsuyoshi YOSHII Naoaki AIZAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1993/11/25
Vol. E76-C  No. 11 ; pp. 1665-1669
Type of Manuscript:  Special Section LETTER (Special Issue on LSI Memories)
Category: Application Specific Memory
Keyword: 
DRAMKrF excimer laserlithography double-layer resisttriple-layer resist
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