Keyword : ITO


Novel Roll-to-Roll Deposition and Patterning of ITO on Ultra-Thin Glass for Flexible OLEDs
Tadahiro FURUKAWA Mitsuhiro KODEN 
Publication:   
Publication Date: 2017/11/01
Vol. E100-C  No. 11 ; pp. 949-954
Type of Manuscript:  INVITED PAPER (Special Section on Electronic Displays)
Category: 
Keyword: 
roll-to-rollITOultra-thin glassOLEDflexiblephotolithography-free
 Summary | Full Text:PDF(1.5MB)

Estimation of Optimum Ion Energy for the Reduction of Resistivity in Bias Sputtering of ITO Thin Films
Kiyoshi ISHII Yoshifumi SAITOU Kengo FURUTANI Hiroshi SAKUMA Yoshito IKEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/10/01
Vol. E91-C  No. 10 ; pp. 1653-1657
Type of Manuscript:  Special Section PAPER (Special Section on Functional Thin Films for Optical Applications)
Category: 
Keyword: 
tin-doped indium oxidetransparent thin filmITOsputtered filmgas flow sputtering
 Summary | Full Text:PDF(576.4KB)

Low Leakage Current ITO Schottky Electrodes for AlGaN/GaN HEMTs
Keita MATSUDA Takeshi KAWASAKI Ken NAKATA Takeshi IGARASHI Seiji YAEGASSI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2008/07/01
Vol. E91-C  No. 7 ; pp. 1015-1019
Type of Manuscript:  Special Section PAPER (Special Section on Heterostructure Microelectronics with TWHM 2007)
Category: GaN Process Technology
Keyword: 
ITOSchottky gatetunnelAlGaN/GaN HEMTgate leakage current
 Summary | Full Text:PDF(511KB)

Low Temperature Deposition of Indium Tin Oxide Thin Films by Low Voltage Sputtering in Various Rare Gases
Yoichi HOSHI Hidehiko SHIMIZU 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2004/02/01
Vol. E87-C  No. 2 ; pp. 212-217
Type of Manuscript:  Special Section PAPER (Special Section on Recent Progress in Oxide Thin Films by Sputtering)
Category: 
Keyword: 
ITOlow voltage sputteringKr gas sputteringXe gas sputteringlow temperature deposition
 Summary | Full Text:PDF(1MB)