Publication: IEICE TRANSACTIONS on Electronics
Publication Date: 1993/01/25
Vol. E76-C
No. 1 ;
pp. 41-46
Type of Manuscript:
Special Section PAPER (Special Issue on Opto-Electronics and LSI)
Category: Opto-Electronics Technology for LSIs
Keyword:
dry cleaning, dielectric breakdown, Fowler-Nordheim leakage current, junction leakage current, metal contamination, |