Keyword : Edge-over-Erosion


Edge-over-Erosion Error Prediction Method Based on Multi-Level Machine Learning Algorithm
Daisuke FUKUDA Kenichi WATANABE Naoki IDANI Yuji KANAZAWA Masanori HASHIMOTO 
Publication:   IEICE TRANSACTIONS on Fundamentals of Electronics, Communications and Computer Sciences
Publication Date: 2014/12/01
Vol. E97-A  No. 12 ; pp. 2373-2382
Type of Manuscript:  Special Section PAPER (Special Section on VLSI Design and CAD Algorithms)
Category: Device and Circuit Modeling and Analysis
Keyword: 
Edge-over-ErosionCMPmanufacturabilitymachine learning
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