Keyword : EB shots


Character-Size Optimization for Reducing the Number of EB Shots of MCC Lithographic Systems
Makoto SUGIHARA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2010/05/01
Vol. E93-C  No. 5 ; pp. 631-639
Type of Manuscript:  Special Section PAPER (Special Section on Fundamentals and Applications of Advanced Semiconductor Devices)
Category: Manufacturing Technology
Keyword: 
maskless lithographycharacter projectionvariable-shaped beammulti-column-cell systemcharacter size optimizationEB shots
 Summary | Full Text:PDF

Cell Library Development Methodology for Throughput Enhancement of Character Projection Equipment
Makoto SUGIHARA Taiga TAKATA Kenta NAKAMURA Ryoichi INANAMI Hiroaki HAYASHI Katsumi KISHIMOTO Tetsuya HASEBE Yukihiro KAWANO Yusuke MATSUNAGA Kazuaki MURAKAMI Katsuya OKUMURA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2006/03/01
Vol. E89-C  No. 3 ; pp. 377-383
Type of Manuscript:  Special Section PAPER (Special Section on VLSI Design Technology in the Sub-100 nm Era)
Category: CAD
Keyword: 
cell librarycharacter projectionelectron beamEB shotsthroughputoptimizationinteger linear programming
 Summary | Full Text:PDF