Keyword : EB lithography


Wide-Wavelength-Range Modulator-Integrated DFB Laser Diodes Fabricated on a Single Wafer
Masayuki YAMAGUCHI Koji KUDO Hiroyuki YAMAZAKI Masashige ISHIZAKA Tatsuya SASAKI 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1998/08/25
Vol. E81-C  No. 8 ; pp. 1219-1224
Type of Manuscript:  INVITED PAPER (Special Issue on High-Capacity WDM/TDM Networks)
Category: Active Devices for Photonic Networks
Keyword: 
distributed feedback laser diodeWDMgratingEB lithographyoptical modulatorMOVPE
 Summary | Full Text:PDF

0.15 µm CMOS Devices with Reduced Junction Capacitance
Akira TANABE Kiyoshi TAKEUCHI Toyoji YAMAMOTO Takeo MATSUKI Takemitsu KUNIO Masao FUKUMA Ken NAKAJIMA Naoki AIZAKI Hidenobu MIYAMOTO Eiji IKAWA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1995/03/25
Vol. E78-C  No. 3 ; pp. 267-273
Type of Manuscript:  Special Section PAPER (Special Issue on Sub-1/4 Micron Device and Process Technologies)
Category: 
Keyword: 
CMOSEB lithographyTi salicideSPICE
 Summary | Full Text:PDF