Keyword : E-beam tester


EB-Testing-Pad Method and its Evaluation by Actual Devices
Norio KUJI Takako ISHIHARA Shigeru NAKAJIMA 
Publication:   IEICE TRANSACTIONS on Information and Systems
Publication Date: 2002/10/01
Vol. E85-D  No. 10 ; pp. 1558-1563
Type of Manuscript:  Special Section PAPER (Special Issue on Test and Verification of VLSI)
Category: EB Tester
Keyword: 
E-beam testerobservabilitystacked viastesting padsmulti level wiring
 Summary | Full Text:PDF

Improvement of E-Beam Observability by Testing-Pad Placement in LSI Design Layout
Norio KUJI Tadao TAKEDA 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 1999/02/25
Vol. E82-C  No. 2 ; pp. 387-392
Type of Manuscript:  PAPER
Category: Integrated Electronics
Keyword: 
E-beam testerobservabilitystacked viastesting padsmulti-level wiringlocal field effects
 Summary | Full Text:PDF