Keyword : Damascene process


Fabrication of Microchannel with Thin Cover Layer for an Optical Waveguide MEMS Switch Based on Microfluidics
Takuji IKEMOTO Yasuo KOKUBUN 
Publication:   IEICE TRANSACTIONS on Electronics
Publication Date: 2007/01/01
Vol. E90-C  No. 1 ; pp. 78-86
Type of Manuscript:  Special Section PAPER (Special Section on Microoptomechatronics)
Category: Micro/Nano Photonic Devices
Keyword: 
optical switchmicroelectromechanical systemmicrochannelDamascene processthin cover layer
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